On-chip dynamic mode atomic force microscopy: a silicon-on-insulator MEMS approach
- Creator: Ruppert, Michael G. , Fowler, Anthony G. , Maroufi, Mohammad , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2017
Feedback-controlled MEMS force sensor for characterization of microcantilevers
- Creator: Moore, Steven Ian , Coskun, M. Bulut , Alan, Tuncay , Neild, Adrian , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2015
Force-controlled MEMS rotary microgripper
- Creator: Piriyanont, Busara , Fowler, Anthony George , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
MEMS nanopositioner for on-chip atomic force microscopy: a serial kinematic design
- Creator: Maroufi, Mohammad , Fowler, Anthony G. , Reza Moheimani, S. O.
- Resource Type: journal article
- Date: 2015
Parallel averaging for thermal noise mitigation in MEMS electrothermal displacement sensors
- Creator: Mohammadi, Ali , Moheimani, S. O. R. , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2015
Tilted beam piezoresistive displacement sensor: design, modeling, and characterization
- Creator: Maroufi, Mohammad , Bazaei, Ali , Mohammadi, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2015
A feedback controlled MEMS nanopositioner for on-chip high-speed AFM
- Creator: Mohammadi, Ali , Fowler, Anthony G. , Yong, Yuen K. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
An omnidirectional MEMS ultrasonic energy harvester for implanted devices
- Creator: Fowler, Anthony G. , Moheimani, S. O. R. , Behrens, Sam
- Resource Type: journal article
- Date: 2014
Displacement measurement with a self-sensing MEMS electrostatic drive
- Creator: Moore, Steven I. , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
Displacement sensing with silicon flexures in MEMS nanopositioners
- Creator: Bazaei, Ali , Maroufi, Mohammad , Mohammadi, Ali , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2014
MEMS rotary microgripper with integrated electrothermal force sensor
- Creator: Piriyanont, Busara , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2014
Design and analysis of nonuniformly shaped heaters for improved MEMS-based electrothermal displacement sensing
- Creator: Fowler, Anthony G. , Bazaei, Ali , Moheimani, S. O. Reza
- Resource Type: journal article
- Date: 2013
A 2-DOF electrostatically actuated MEMS nanopositioner for on-chip AFM
- Creator: Fowler, A. G. , Laskovski, A. N. , Hammond, A. C. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
A low-flicker-noise MEMS electrothermal displacement sensing technique
- Creator: Mohammadi, A. , Yuce, M. R. , Moheimani, S. O. R.
- Resource Type: journal article
- Date: 2012
Design, modeling, and control of a micromachined nanopositioner with integrated electrothermal actuation and sensing
- Creator: Zhu, Yong , Bazaei, Ali , Moheimani, S. O. Reza , Yuce, Mehmet Rasit
- Resource Type: journal article
- Date: 2011
Q control of an atomic force microscope microcantilever: a sensorless approach
- Creator: Fairbairn, Matthew W. , Moheimani, S. O. Reza , Fleming, Andrew J.
- Resource Type: journal article
- Date: 2011